NANOFABRICATION DEVICE AND METHOD FOR MANUFACTURE OF A NANOFABRICATION DEVICE

United States of America Patent

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Issued Date
Oct 11, 2012
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Sep 29, 2011
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Jul 15, 2010

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Abstract

A nanofabrication device in an example includes a conducting nanotip and a gas microchannel adjacent to the nanotip and configured to deliver a gas to the nanotip. The nanofabrication device can be used for controlled and localized etching and/or deposition of material from a substrate.

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UNIVERSITY OF UTAH RESEARCH FOUNDATION	615 ARAPEEN DRIVE SUITE 310 SALT LAKE CITY UT 84108

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Inventor Name	Address	# of filed Patents	Total Citations
Mastrangelo, Carlos H	Salt Lake City, US	22	2022
Tabib-Azar, Massood	Salt Lake City, US	16	54

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NANOFABRICATION DEVICE AND METHOD FOR MANUFACTURE OF A NANOFABRICATION DEVICE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13249093

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13249093

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