Electrostatic chuck having a plurality of heater coils
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United States of America Patent
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-
Mar 4, 2014
Grant Date -
Nov 15, 2012
app pub date -
Jul 23, 2012
filing date -
Apr 27, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
An electrostatic chuck for receiving a substrate in a substrate processing chamber comprises a ceramic puck having a substrate receiving surface having a plurality of spaced apart mesas, an opposing backside surface, and central and peripheral portions. A plurality of heat transfer gas conduits traverse the ceramic puck and terminate in ports on the substrate receiving surface to provide heat transfer gas to the substrate receiving surface. An electrode is embedded in the ceramic puck to generate an electrostatic force to retain a substrate placed on the substrate receiving surface. A plurality of heater coils are also embedded in the ceramic puck, the heaters being radially spaced apart and concentric to one another.
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