INJECTOR FOR A VACUUM VAPOUR DEPOSITION SYSTEM
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United States of America Patent
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Issued Date -
Nov 22, 2012
app pub date -
May 2, 2012
filing date -
May 18, 2011
priority date (Note) -
Abandoned
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Abstract
An injector for a vacuum vapour deposition system, includes an injection duct suitable for receiving vaporized materials from a vacuum evaporation source and a diffuser having a plurality of nozzles for diffusing the vaporized materials into a vacuum deposition chamber, each nozzle including a channel suitable for connecting the injection duct to the deposition chamber. The diffuser has a spatially varying nozzle distribution. A process for calibrating an injector and a process for manufacturing a diffuser for an injector are also described.
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