Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion

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United States of America Patent

PATENT NO 9072158
APP PUB NO 20120299671A1
SERIAL NO

13551122

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Abstract

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An electromagnetic-radiation power-supply mechanism includes a microwave power introduction port provided on the side of the coaxial waveguide, a power line being connected to the microwave power introduction port; and a power supply antenna for radiating the electromagnetic wave power into the waveguide, the power supply antenna being connected to the power line. The power supply antenna includes an antenna body having a first pole connected to the power line and a second pole connected to an inner conductor of the waveguide; and a ring-shaped reflection portion extending from opposite sides of the antenna body.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ikeda, Taro Nirasaki, JP 158 2827
Kasai, Shigeru Nirasaki, JP 137 4375
Osada, Yuki Nirasaki, JP 32 1305

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