METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
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United States of America Patent
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Issued Date -
Dec 6, 2012
app pub date -
Apr 11, 2012
filing date -
Oct 22, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus for fluid processing at least one workpiece is provided. The apparatus includes a housing configured to hold a fluid, a workpiece holder disposed within the housing and configured to retain the at least one workpiece and an electric field shield plate disposed within the housing adjacent each of the at least one workpiece, the electric field shield plate having at least one contoured area configured to vary a distance between the electric field shield plate and a surface of the workpiece in a space between the at least one contoured area and a corresponding portion of the surface of the workpiece.
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