PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM LOADER
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United States of America Patent
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N/A
Issued Date -
Dec 6, 2012
app pub date -
Jun 4, 2012
filing date -
Jun 3, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate unload and load apparatus adapted to unload and load a plurality of processed substrates from a plurality of arrayed substrate holders, the apparatus having a frame and a plurality of processed substrate supports coupled to the frame configured to support the processed substrates. A plurality of unprocessed substrate supports is coupled to the frame configured to support the unprocessed substrates, each of the unprocessed substrate supports alternating and interleaved with each of the processed substrate supports. A holder release is coupled to the frame and configured to engage the arrayed substrate holders having a first state where the arrayed substrate holders releases the processed substrates from the arrayed substrate holders, the holder release having a second state where the arrayed substrate holders captures the unprocessed substrates with arrayed substrate holders.
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