POTENTIAL OBTAINING APPARATUS, MAGNETIC FIELD MICROSCOPE, INSPECTION APPARATUS, AND POTENTIAL OBTAINING METHOD

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United States of America Patent

APP PUB NO 20120330581A1
SERIAL NO

13582151

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a magnetic field obtaining apparatus, a measuring part (21) that is sufficiently longer than the width of an area to be measured is disposed on a measurement plane that satisfies z=α, and scanning in an X′ direction perpendicular to the longitudinal direction of the measuring part (21) is repeated while changing an angle θ formed by a predetermined reference direction on the measurement plane and the longitudinal direction of the measuring part (21) to a plurality of angles. Assuming that x′ is a coordinate parameter in the X′ direction, measured values f(x′, θ) obtained by repetitions of the scanning are Fourier transformed so as to obtain g(kx′, θ) (where kx′ is a wavenumber in the X′ direction). Then, g(kx′, θ) is substituted into a predetermined two-dimensional potential obtaining equation so as to obtain φ(x, y, α) that indicates a two-dimensional potential on the measurement plane. Accordingly, it is possible to perform high-resolution two-dimensional potential measurement as a result of using the measuring part (21) that is sufficiently larger than the width of an area to be measured.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL UNIVERSITY CORPORATION KOBE UNIVERSITY1-1 ROKKODAI-CHO NADA-KU KOBE-SHI HYOGO 6578501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kimura, Kenjiro kobe-shi, JP 24 78

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