Trap apparatus and substrate processing apparatus
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United States of America Patent
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Jun 30, 2015
Grant Date -
Jan 10, 2013
app pub date -
Jun 20, 2011
filing date -
Jun 29, 2010
priority date (Note) -
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Abstract
A trap apparatus provided between a chamber and an evacuating unit, includes an inlet port and an exhausting port to be respectively connected to the chamber and the evacuating unit; a cooling trap portion provided with a first space for cooling gas in the first space; and a bypass portion provided with a first channel capable of communicating between the inlet port and the first space, a second channel capable of communicating between the first space and the exhausting port, and a second space capable of communicating between the inlet port and the exhausting port, the bypass portion being relatively movable with respect to the cooling trap portion to selectively form a first path from the inlet port to the exhausting port via the first channel, the first space and the second channel, and a second path from the inlet port to the exhausting port via the second space.
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