ULTRASONIC CLEANING APPARATUS AND ULTRASONIC CLEANING METHOD
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United States of America Patent
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Issued Date -
Jan 10, 2013
app pub date -
Jun 2, 2011
filing date -
Jun 7, 2010
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Abstract
To provide an ultrasonic cleaning apparatus and an ultrasonic cleaning method capable of suppressing generation of cleaning unevenness after the ultrasonic cleaning of an object to be cleaned. An aspect of the present invention includes a cleaning tank 21 in which a cleaning liquid 23 is stored; a first and a second ultrasonic transducers 34a and 34b that give ultrasonic vibrations to the object to be cleaned 22 immersed in a cleaning liquid within the cleaning tank; a first ultrasonic generator 36 that applies a high-frequency output to the first ultrasonic transducer; a second ultrasonic generator 37 that applies a high-frequency output to the second ultrasonic transducer; and a controller 38 that varies and controls at least one of the outputs of the first and the second ultrasonic generators, and a first ultrasonic wave oscillated from the first ultrasonic transducer is caused to interfere with a second ultrasonic wave oscillated from the second ultrasonic transducer.
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