FILTER COMPRISING STACKABLE FILTER WAFERS WITH FILTERING CHANNELS ON OPPOSING SIDES OF THE WAFERS
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United States of America Patent
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Issued Date -
Jan 10, 2013
app pub date -
Apr 4, 2011
filing date -
Apr 14, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A filter comprises a stack of wafers (28). Each of the wafers has a through hole (6). Edges (7) of the holes together define an internal tube. An interface (32) between adjacent wafers defines filter channels. The filter channels comprises first coarse filter channels (20), second coarse filter channels (22) and fine filter channels (26). The first coarse filter channels are open towards an outer rim (5), extend in a direction from the outer rim and are closed towards the internal tube. The second coarse filter channels are arranged in an opposite manner. The fine filter channels connect the first and second coarse filter channels. The first and second coarse filter channels extend radially (R) and the fine filter channels extend tangentially (T). The first and second coarse filter channels are defined by recesses in a surface of a first wafer and the fine filter channels are defined by recesses, each one encircling the hole, in a surface of a second wafer.
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