LAMINATE POLISHING PAD
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United States of America Patent
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N/A
Issued Date -
Jan 10, 2013
app pub date -
Mar 11, 2011
filing date -
Mar 25, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An object of the invention is to provide a laminate polishing pad having a polishing layer and a cushion layer, which resist peeling. A laminate polishing pad including: a polishing layer with no region passing therethrough; an adhesive member; and a cushion layer placed on the polishing layer with the adhesive member interposed therebetween, wherein the back side of the polishing layer has at least one non-adhering region X continuously extending from a central region of the polishing layer to a peripheral end of the polishing layer, and/or the adhesive member has at least one non-adhering region Y continuously extending from a central region of the adhesive member to a peripheral end of the adhesive member.
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