Fluid control device
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United States of America Patent
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Dec 15, 2015
Grant Date -
Feb 14, 2013
app pub date -
Aug 8, 2012
filing date -
Aug 10, 2011
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.
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Family
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Cited Art Landscape
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