HIGH DENSITY TRACE FORMATION METHOD BY LASER ABLATION

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United States of America Patent

APP PUB NO 20130037312A1
SERIAL NO

13207059

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Abstract

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A method for making a microelectronic substrate includes forming a pattern of a selected metallic layer of an in-process unit using laser ablation such that the pattern corresponds to desired locations for conductive features. Conductive material is than added to the in-process unit by a process that uses the pattern to concentrate application of the conductive material to the in-process unit such that the conductive material forms conductive features of the substrate according to the pattern. The step forming a pattern of a selected metallic layer of an in-process unit using laser ablation can includes the use of a UV laser, a CO2 or an excimer laser.

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Patent Owner(s)

Patent OwnerAddress
INVENSAS CORPORATION3025 ORCHARD PARKWAY SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Masuda, Norihito Yokohama, JP 23 591
Sato, Hiroaki Yokohama, JP 256 3746

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