Apparatus for forming metal oxide film, method for forming metal oxide film, and metal oxide film
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United States of America Patent
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Mar 8, 2016
Grant Date -
Feb 14, 2013
app pub date -
Jun 1, 2010
filing date -
Jun 1, 2010
priority date (Note) -
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Abstract
A film forming apparatus includes a first solution container, a second solution container, a reaction chamber, a first path, and a second path. The first solution container stores a source solution containing metal. The second solution container stores hydrogen peroxide. A substrate is in the reaction chamber, and the reaction chamber includes a heating unit that heats the substrate. The first path supplies a source solution from the first solution container to the reaction chamber. The second path supplies hydrogen peroxide from the second solution container to the reaction chamber.
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