Generation of combinatorial patterns by deliberate tilting of a polymer-pen array

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United States of America Patent

PATENT NO 8753813
APP PUB NO 20130040856A1
SERIAL NO

13513618

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Abstract

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The disclosure relates to a method of forming a pattern having pattern elements with a plurality of sizes on a substrate surface with a tilted pen array that includes choosing a tilt geometry for a pen array with respect to a substrate, inducing the tilt geometry between the pen array and the substrate surface, and forming a pattern having pattern elements on the substrate surface with the titled pen array, whereby the size of the formed pattern elements varies across the substrate surface along the tilted axis or axes. For example, the tilt geometry is in reference to the substrate surface and comprises a first angle with respect to a first axis of the substrate and a second angle with respect to a second axis of the substrate, the second axis being perpendicular to the first axis, and at least one of the first and second angles being non-zero.

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Patent Owner(s)

Patent OwnerAddress
NORTHWESTERN UNIVERSITY633 CLARK STREET EVANSTON IL 60208

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Braunschweig, Adam B New York, US 17 69
Chai, Jinan Spartanburg, US 5 34
Eichelsdoerfer, Dan J Evanston, US 1 7
Giam, Louise R Palo Alto, US 7 59
Liao, Xing Evanston, US 12 171
Mirkin, Chad A Wilmette, US 279 6087
Wong, Lu Shin Manchester, GB 1 7

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