Importance

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Abstract

A disclosed digital sensor includes a pair of piezoelectric sensors that respond to acceleration and pressure in opposite ways, a pair of digital transducer circuits each employing a quantized feedback path to obtain digital sensor signals for the piezoelectric sensors, and a combiner circuit that combines the digital sensor signals to produce a compensated digital output signal. The compensated digital output signal may be a pressure compensated acceleration signal, an acceleration compensated pressure signal, or both. Also disclosed is a signal detection method that includes configuring a pair of piezoelectric membranes in a piezoelectric sensor to respond to acceleration and pressure in opposite ways, and based on their responses, producing at least one of a digital pressure compensated acceleration signal and a digital acceleration compensated pressure signal. The digital signals may be produced in part by applying a quantized feedback signal to at least one of the piezoelectric membranes.

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First Claim