Target supply unit

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8779401
APP PUB NO 20130048878A1
SERIAL NO

13533464

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Importance

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Abstract

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A target supply unit includes a nozzle unit having a through-hole to allow a target material to be outputted therethrough. A cover is provided to cover the nozzle unit, the cover having a through-hole to allow the target material to pass therethrough. A discharge device is included to pump out gas inside a space defined by the cover.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INC400 YOKOKURASHINDEN OYAMA-SHI TOCHIGI-KEN 323-8558

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mizoguchi, Hakaru Oyama, JP 65 969
Nishisaka, Toshihiro Hiratsuka, JP 35 276
Yabu, Takayuki Hiratsuka, JP 65 572

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