Importance

Loading Importance Indicators...

Abstract

A method of programming a recipe through a GUI and a media recording the same applied to process recipe editing for semiconductor/photoelectric equipment includes: providing the GUI comprising a template area and a working area, wherein the template area has a plurality of control objects and/or a plurality of macro objects; and the working area has a chart; defining a plurality of procedures of the recipe on the chart; defining required objects of the recipe by dragging the required objects from the control objects and the macro objects into the chart to form a characteristic curve with an initial value for each object; and setting a control parameter of each characteristic curve in each procedure, wherein the control parameter comprises a slope and at least a setting point. By dragging on a chart, a process personnel performs scheduling of the process recipe intuitively, thereby reducing the development and debugging time.

Loading the Abstract Image...

First Claim