Method using block copolymers and a hard electroplated mask for making a master disk for nanoimprinting patterned magnetic recording disks
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United States of America Patent
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Aug 20, 2013
Grant Date -
Mar 21, 2013
app pub date -
Sep 19, 2011
filing date -
Sep 19, 2011
priority date (Note) -
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Abstract
A method for making a master disk to be used in the nanoimprinting process to make patterned-media disks uses an electrically conductive substrate and guided self-assembly of a block copolymer to form patterns of generally radial lines and/or generally concentric rings of one of the block copolymer components. A metal is electroplated onto the substrate in the regions not protected by the lines and/or rings. After removal of the block copolymer component, the remaining metal pattern is used as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
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