Electromechanical device with optical function separated from mechanical and electrical function

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United States of America Patent

PATENT NO 9001412
APP PUB NO 20130069958A1
SERIAL NO

13648750

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Abstract

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A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

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Patent Owner(s)

Patent OwnerAddress
SNAPTRACK INC5775 MOREHOUSE DR SAN DIEGO CA 92121

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiang, Chih-Wei Hsin-Chu, TW 25 346
Chui, Clarence San Jose, US 271 8883
Cummings, William Hsinchu, TW 32 785
Endisch, Denis Cupertino, US 15 488
Gally, Brian James Los Gatos, US 20 554
Kogut, Lior Haifa, IL 45 1538
Tung, Ming-Hau San Francisco, US 78 2861
Tung, Yeh-Jiun Sunnyvale, US 38 1550

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