COMPONENT MANIPULATOR FOR THE DYNAMIC POSITIONING OF A SUBSTRATE, COATING METHOD, AS WELL AS USE OF A COMPONENT MANIPULATOR
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United States of America Patent
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Issued Date -
Mar 21, 2013
app pub date -
Mar 14, 2012
filing date -
Mar 17, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
The invention relates to a component manipulator for the dynamic positioning of a substrate to be treated in a thermal treatment process, wherein the component manipulator includes a main drive axle rotatable about a main rotary axis, a connection element and a substrate holder connectable to the connection element. In accordance with the invention the connection element is a ceramic connection element and a connection segment of the substrate holder is connectable to the connection element in a pull resistant and rotationally fixed manner by means of a plug and rotate connection with regard to a connection axis (V) of the plug and rotate connection and the substrate holder (5) is arranged rotatable about the connection axis (V). The invention further relates to a coating method, to a coating apparatus, as well as to the use of a component manipulator.
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