Importance

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Abstract

A substrate stopped at a first position is transferred toward a second position and is stopped at the second position in an accurate and stable manner. An intermediate position arrival time AT is measured while the substrate is being transferred from a substrate stop position toward a mounting work position, and a transfer status of the substrate (whether or not an unexpected factor has occurred) is assessed based on the intermediate position arrival time AT. Before the substrate reaches the second position, a deceleration pattern is controlled by altering a deceleration start timing T14 and the deceleration b in accordance with the intermediate position arrival time AT, thereby accurately stopping and positioning the substrate at the mounting work position. In this manner, under feed-forward control, the substrate can be stably transferred to the mounting work position.

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First Claim