Carrier and adhesion amount measuring apparatus, and measuring method, program, and recording medium of the same

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United States of America Patent

PATENT NO 8969807
APP PUB NO 20130075612A1
SERIAL NO

13679081

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Abstract

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A carrier includes attachment holes to which a catalyst attaches, and non-attachment holes to which the catalyst does not attach. An attachment quantity measurement device includes an electromagnetic wave output device that outputs a terahertz wave toward the carrier, an electromagnetic wave detector that detects the terahertz wave which has transmitted through the carrier, a reference value obtainer that obtains, based on a result detected by the electromagnetic wave detector, any one of an absorption rate, a group delay, and a dispersion of the terahertz wave in the non-attachment holes, and an attachment quantity obtainer that obtains, based on the result detected by the electromagnetic wave detector and the result obtained by the reference value obtainer, a weight or a density of the catalyst present in the attachment holes.

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Patent Owner(s)

Patent OwnerAddress
ADVANTEST CORPORATION1-6-2 MARUNOUCHI CHIYODA-KU TOKYO 1000005 ?1000005

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imamura, Motoki Miyagi, JP 16 115
Nishina, Shigeki Miyagi, JP 18 88

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