METHODS AND SYSTEMS FOR PURIFYING GASES
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United States of America Patent
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app pub date -
Oct 12, 2012
filing date -
Mar 29, 2007
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Abandoned
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Abstract
The present invention relates to methods and systems for purifying gases, such as for example semiconductor process gases. The invention more particularly relates to fluid purification methods and systems having improved heat transfer capabilities and controls such that the purified fluid produced from the process contains reduced impurity levels and/or exhibits more uniform concentrations within the final product. In another aspect of the invention, the activation time for adsorbent beds used in such processes and systems can be reduced.
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