APPARATUS AND METHOD FOR TREATING SUBSTRATE

United States of America Patent

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Apr 4, 2013
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Sep 11, 2012
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Sep 30, 2011

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Abstract

Provided are an apparatus and method for treating a substrate through a supercritical process. The apparatus includes a housing providing a space for performing a process, and a plurality of support members vertically arranged in the housing at predetermined intervals to support edges of substrates, respectively.

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Patent Owner(s)

Patent Owner	Address
SEMES CO LTD	77 4SANDAN 5-GIL JIKSAN-EUP SEOBUK-GU CHEONAN-SI CHUNGCHEONGNAM-DO 31040

International Classification(s)

B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
BAE, Jeong Yong	Cheonan-si, KR	10	497
KOO, Kyo Woog	Cheonan-si, KR	4	45
SONG, Gil Hun	Cheonan-si, KR	9	34

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APPARATUS AND METHOD FOR TREATING SUBSTRATE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13609986

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13609986

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