Sintered oxide body, target comprising the same, and oxide semiconductor thin film

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United States of America Patent

PATENT NO 9153438
APP PUB NO 20130082218A1
SERIAL NO

13699851

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Abstract

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An oxide sintered body including an oxide of indium and aluminum and having an atomic ratio Al/(Al+In) of 0.01 to 0.08.

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Patent Owner(s)

Patent OwnerAddress
IDEMITSU KOSAN CO LTDTOKYO 100-8321

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ebata, Kazuaki Sodegaura, JP 16 75
Inoue, Kazuyoshi Sodegaura, JP 118 4436
Tomai, Shigekazu Sodegaura, JP 57 1357
Yano, Koki Sodegaura, JP 85 4057

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