WAFER TRAY, SEMICONDUCTOR WAFER TEST APPARATUS, AND TEST METHOD OF SEMICONDUCTOR WAFER
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United States of America Patent
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Issued Date -
Apr 4, 2013
app pub date -
Aug 31, 2010
filing date -
Aug 31, 2010
priority date (Note) -
Abandoned
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Abstract
A wafer tray which holds a semiconductor wafer includes a wafer set plate on which the semiconductor wafer is set, a tray body which supports the wafer set plate to be able to finely move, and a vibration actuator which imparts vibration to the wafer set plate.
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