Apparatus and method for estimating wavefront parameters

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United States of America Patent

PATENT NO 9182289
APP PUB NO 20130092816A1
SERIAL NO

13418073

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Abstract

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An apparatus for estimating a wavefront parameter includes a light source, a lenslet array, a detector for detecting light generated by the light source and passed through the lenslet array, a wavefront corrective element disposed between the lenslet array and the light source; and a data analyzer configured to estimate at least one wavefront parameter at a plane located on the light source side of the corrective element. The lenslet array and the sensor array are arranged to form a wavefront sensor, and the wavefront corrective element is configured to correct an aberration of the wavefront.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 146-8501

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barrett, Harrison Tucson, US 3 23
Caucci, Luca Tucson, US 9 44
Furenlid, Lars Tucson, US 6 29
Ohkubo, Akinori Utsunomiya, JP 19 87

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