Window and mounting arrangement for twist-and-lock gas injector assembly of inductively coupled plasma chamber
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United States of America Patent
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Apr 17, 2018
Issued Date -
N/A
app pub date -
Oct 25, 2011
filing date -
Oct 25, 2011
priority date (Note) -
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Abstract
An improved gas injection assembly for mounting in a central bore of a dielectric window of an inductively coupled plasma chamber includes a window having a central bore and cylindrical recess configured to receive an annular insert having a bayonet opening. The gas injector assembly includes a gas injector, an RF shield surrounding the gas injector, and a faceplate surrounding the RF shield, the faceplate including projections at the bottom thereof for engaging the bayonet opening in the annular insert. The window and gas injection assembly are designed to avoid chipping of the window which is typically made of quartz and in prior mounting arrangements the window has a bayonet opening machined therein. Due to the brittle nature of the quartz material, the machined bayonet opening was subject to chipping when the gas injector assembly was inserted into the bayonet opening.
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