Piezoelectric device and method of manufacturing piezoelectric device

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United States of America Patent

PATENT NO 9136459
APP PUB NO 20130099627A1
SERIAL NO

13644178

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Abstract

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A piezoelectric device includes: a substrate; a first electrode which is layered over the substrate; a first piezoelectric film which is layered over the first electrode; a metal oxide film which is layered over the first piezoelectric film; a metal film which is layered over the metal oxide film; a second piezoelectric film which is layered over the metal film; and a second electrode which is layered over the second piezoelectric film.

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Patent Owner(s)

Patent OwnerAddress
FUJIFILM CORPORATIONTOKYO 106-8620

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Takamichi Ashigarakami-gun, JP 87 683
Hishinuma, Yoshikazu Santa Clara, US 34 235

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