Multi-wavelength interferometer, measurement apparatus, and measurement method
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United States of America Patent
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Jun 23, 2015
Grant Date -
Apr 25, 2013
app pub date -
Oct 22, 2012
filing date -
Oct 24, 2011
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Abstract
A multi-wavelength interferometer includes a beam splitter configured to split plural light fluxes into a reference beam and a measurement beam, a frequency shifter configured to shift a frequency of at least one of the reference beam and the measurement beam to make the frequencies of the reference beam and the measurement beam different from each other, an optical system configured to cause the measurement beam to be incident on a measurement surface and to cause the measurement beam reflected from the measurement surface to interfere with the reference beam to obtain interference light, a dividing unit configured to divide the interference light into a plurality of light beams, and a detection unit configured to detect the plurality of light beams divided by the dividing unit.
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