TUNING MOVABLE LAYER STIFFNESS WITH FEATURES IN THE MOVABLE LAYER
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United States of America Patent
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Issued Date -
Apr 25, 2013
app pub date -
Feb 23, 2012
filing date -
Oct 20, 2011
priority date (Note) -
Abandoned
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Abstract
This disclosure provides systems, methods and apparatus for an electromechanical systems device. In one aspect, an electromechanical systems device may include a substrate and a movable layer positioned apart from the substrate. The movable layer and the substrate may define a cavity. The movable layer may be movable to increase the size of the cavity or to decrease the size of the cavity. The movable layer also may include a first anchor point attaching the movable layer to the substrate and a first feature associated with the first anchor point. The first feature may include a protrusion of the movable layer into or out from the cavity.
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