METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING LIQUID EJECTION HEAD, AND METHOD OF MANUFACTURING LIQUID EJECTING APPARATUS
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United States of America Patent
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Issued Date -
Apr 25, 2013
app pub date -
Oct 18, 2012
filing date -
Oct 20, 2011
priority date (Note) -
Abandoned
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Abstract
A method of manufacturing a piezoelectric element includes a process of forming on the surface of an electrode having lanthanum nickel preferentially aligned in (100) plane, at least on a surface thereof; a process of applying a precursor solution including at least Bi, Ba, Fe, and Ti onto the surface of the electrode, and a process of crystallizing the applied precursor solution to form the piezoelectric layer including a perovskite oxide preferentially aligned in (100) plane.
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