Method of heating dispersion composition and method of forming glass pattern

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United States of America Patent

PATENT NO 8623469
APP PUB NO 20130101754A1
SERIAL NO

13656059

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided are a method of heating a composition which is applicable to a substrate provided with a material having low heat resistance and a method of forming a glass pattern which leads to reduction of cracks. A composition formed over a substrate is irradiated with a laser beam to bake the paste through local heating. Scan with the laser beam is performed so that there can be no difference in the laser beam irradiation period between the middle portion and the perimeter portion of the composition. Specifically, irradiation with the laser beam is performed so that the width of the beam spot overlapping with the composition in the scanning direction is substantially uniform.

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Patent Owner(s)

  • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miyairi, Hidekazu Kanagawa, JP 310 9103
Shimomura, Akihisa Kanagawa, JP 211 3295

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