OPTICAL AIR SLIT AND METHOD FOR MANUFACTURING OPTICAL AIR SLITS
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United States of America Patent
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Issued Date -
Apr 25, 2013
app pub date -
Oct 21, 2011
filing date -
Oct 21, 2011
priority date (Note) -
Abandoned
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Abstract
A structure having an optical slit therein. The structure includes a substrate having an opening therethrough and a metal layer disposed on the substrate, such metal layer having a photolithographically formed slit therein, such slit being narrower than the opening and being disposed over the opening, portions of the metal layer disposed adjacent the slit being suspended over the opening and other portions of the metal layer being supported by the substrate.
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