Sputtering target, transparent conductive film and transparent electrode

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United States of America Patent

PATENT NO 9202603
APP PUB NO 20130101807A1
SERIAL NO

13712024

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Abstract

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A sputtering target including indium, tin, zinc and oxygen, and including a hexagonal layered compound, a spinel structure compound and a bixbyite structure compound.

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Patent Owner(s)

Patent OwnerAddress
IDEMITSU KOSAN CO LTD2-1 OTEMACHI 1-CHOME CHIYODA-KU TOKYO 1008321 ?1008321

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Kazuyoshi Sodegaura, JP 118 4436
Tanaka, Nobuo Sodegaura, JP 67 2016
Yano, Koki Sodegaura, JP 85 4057

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