Method of manufacturing metal oxide film
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United States of America Patent
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Jun 17, 2014
Grant Date -
Apr 25, 2013
app pub date -
Jun 8, 2011
filing date -
Jun 8, 2010
priority date (Note) -
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Abstract
Provided is a method of manufacturing a metal oxide film to be formed through the following processes: a coating process of forming a coating film on a substrate by using a coating liquid for forming metal oxide film containing any of various organometallic compounds; a drying process of making the coating film into a dried coating film; and a heating process of forming an inorganic film from the dried coating film under an oxygen-containing atmosphere having a dew-point temperature equal to or lower than −10° C.
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