MULTI-MODAL DATA ANALYSIS FOR DEFECT IDENTIFICATION

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United States of America Patent

SERIAL NO

13449885

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Abstract

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A technique for identifying a defect in an object produced by a controllable process is disclosed. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES INCMAPLES CORPORATE SERVICES LIMITED PO BOX 309 UGLAND HOUSE GRAND CAYMAN KY1-1104

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amini, Lisa Yorktown Heights, US 25 916
Barker, Brian Christopher Poughkeepsie, US 2 9
Hartswick, Perry G Millbrook, US 13 323
Turaga, Deepak S Nanuet, US 59 604
Verscheure, Olivier Hopewell Junction, US 61 1141
Wong, Justin Wai-chow South Burlington, US 11 591

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