MEASUREMENT METHOD
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United States of America Patent
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Issued Date -
Apr 25, 2013
app pub date -
Oct 1, 2012
filing date -
Oct 19, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a measurement method of measuring a shape of a surface to be measured having an outer shape of a regular hexagon, including a first step of setting, on the surface to be measured, a plurality of partial regions having an identical outer shape of a parallelogram to cover the entire surface to be measured, a second step of measuring surface shapes of the respective partial regions by a measurement apparatus to obtain measurement data of the respective partial regions, and a third step of connecting the measurement data of the respective partial regions to calculate the shape of the surface to be measured, wherein the parallelogram has internal angles of 120° and 60°, and a maximum length of one side is not larger than a length of one side of the regular hexagon.
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