High bevel angle magnetic writer pole fabrication process
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United States of America Patent
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Jun 25, 2013
Grant Date -
May 2, 2013
app pub date -
Oct 31, 2011
filing date -
Oct 31, 2011
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Abstract
Methods of making write poles for perpendicular magnetic recording write heads. The bevel angle of the write pole for a perpendicular magnetic recording write head affects the performance of the write head. By forming reinforcement layer on the polymeric underlayer mask to enhance the mask durability during ion mill and tapering the polymeric underlayer above the non-magnetic mill mask layer using oxygen and nitrogen based reactive ion etch process, the bevel angle of the magnetic write pole can be increased greatly to meet the demands of the next and future generations of magnetic recording write heads.
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