Micromechanical component and method for manufacturing a micromechanical component

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United States of America Patent

PATENT NO 9097736
APP PUB NO 20130104654A1
SERIAL NO

13658949

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Abstract

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A micromechanical component includes: a substrate; a seismic weight joined to the substrate at a first suspension mount; at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount. The first electrode is mechanically connected to the second suspension mount with the aid of a support arm and set apart from the second suspension mount.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHPOSTFACH 30 02 20 STUTTGART 70442

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Classen, Johannes Reutlingen, DE 109 824
Kaelberer, Arnd Schlierbach, DE 23 228
Tebje, Lars Reutlingen, DE 27 152

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