Mixed acid cleaning assemblies
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United States of America Patent
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Mar 22, 2016
Grant Date -
May 2, 2013
app pub date -
May 30, 2012
filing date -
Oct 31, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
In one embodiment, a cleaning assembly may include a modular electrode sealing housing, an acid injection inlet, and a fluid injection inlet. The modular electrode sealing housing may include a high pressure closure member that contains a first cleaning volume and a low pressure closure member that contains a second cleaning volume. The acid injection inlet can be in fluid communication with the first cleaning volume of the high pressure closure member. The fluid injection inlet can be in fluid communication with the second cleaning volume of the low pressure closure member. During normal operation, a showerhead electrode can be sealed within the modular electrode sealing housing such that the first cleaning volume is located on a first side and the second cleaning volume is located on a second side of the showerhead electrode.
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