Piezoelectric mechanism having electrodes within thin film sheet that are substantially perpendicular to substrate
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United States of America Patent
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May 3, 2016
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N/A
app pub date -
Jun 30, 2010
filing date -
Jun 30, 2010
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Abstract
A piezoelectric actuator is formed by forming first and second electrodes on a substrate, and depositing a material on the substrate and between side surfaces of adjacent first and second electrodes to form a thin film sheet within which the first and the second electrodes extend from a first surface of the thin film sheet towards a second surface of the thin film sheet opposite the first surface. The second electrode is interdigitated in relation to the first electrode. The side surfaces of the first and the second electrodes are at least substantially perpendicular to the substrate. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet via application of a voltage across the first and the second electrodes.
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