Flash memory cell with flair gate

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United States of America Patent

PATENT NO 9190531
APP PUB NO 20130105878A1
SERIAL NO

13725654

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Abstract

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An embodiment of the present invention is directed to a method of forming a memory cell. The method includes etching a trench in a substrate and filling the trench with an oxide to form a shallow trench isolation (STI) region. A portion of an active region of the substrate that comes in contact with the STI region forms a bitline-STI edge. The method further includes forming a gate structure over the active region of the substrate and over the STI region. The gate structure has a first width substantially over the center of the active region of the substrate and a second width substantially over the bitline-STI edge, and the second width is greater than the first width.

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Patent Owner(s)

Patent OwnerAddress
MONTEREY RESEARCH LLC3945 FREEDOM CIRCLE SUITE 900 SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Kuo-Tung Saratoga, US 118 2735
Ding, Meng San Jose, US 48 354
Fang, Shenqing Fremont, US 127 970
Suh, YouSeok Cupertino, US 48 185

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