Nonvolatile semiconductor memory device
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United States of America Patent
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Sep 16, 2014
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N/A
app pub date -
Aug 2, 2012
filing date -
Nov 1, 2011
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Abstract
According to one embodiment, a nonvolatile semiconductor memory device includes a semiconductor layer, first and second stacked bodies, first and second channel body layers, first and second memory films. The first stacked body includes electrode layers and first insulating films alternately stacked on the semiconductor layer. The first channel body layers pierces through the first stacked body in a stacking direction. Lower ends of the first channel body layers are connected. The first memory film is provided between the first channel body layers and the electrode layers. The second channel body layers pierces through the first stacked body in the stacking direction. Lower ends of the second channel body layers are connected. The second memory film is provided between the second channel body layers and the electrode layers. The second stacked body includes a first interlayer insulating film and a select gate layer.
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