Semiconductor device and drive method of electrostatic actuator
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United States of America Patent
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Dec 10, 2013
Grant Date -
May 2, 2013
app pub date -
Dec 19, 2012
filing date -
Aug 30, 2010
priority date (Note) -
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Abstract
According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.
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