Self-polarized capacitive micromechanical resonator apparatus and fabrication method
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United States of America Patent
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Oct 6, 2015
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May 2, 2013
app pub date -
Jul 6, 2011
filing date -
Jul 6, 2010
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Abstract
The present invention is directed towards a self-polarized capacitive micromechanical resonator apparatus and fabrication method. The apparatus includes a body member capable of retaining a polarization charge in the absence of a polarization voltage source. By creating potential wells or charge traps on the surface of the resonant body member through a nitrogen diffusing process, charges may be trapped in the charge traps. Unless perturbed externally, the charges remain trapped thus enabling a self-polarization technique without the need for any externally applied polarization voltage.
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