Planarized electrode for improved performance in bulk acoustic resonators

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United States of America Patent

PATENT NO 9525399
APP PUB NO 20130106534A1
SERIAL NO

13286038

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Abstract

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In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a cavity disposed in a substrate; a first electrode disposed over the cavity; a planarization layer disposed adjacent to the first electrode; a piezoelectric layer disposed over the first electrode; and a second electrode disposed over the piezoelectric layer.

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Patent Owner(s)

Patent OwnerAddress
AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LIMITEDSINGAPORE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bader, Stefan Fort Collins, US 51 1972
Burak, Dariusz Fort Collins, US 79 2151
Choy, John Westminster, US 64 2569
Nikkel, Phil Loveland, US 51 1700
Shirakawa, Alexandre San Jose, US 22 801

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