Acoustic wave device and module including a dielectric film with an inclined upper surface

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United States of America Patent

PATENT NO 8896399
SERIAL NO

13725514

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Abstract

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An acoustic wave device includes: a substrate; a dielectric film formed on the substrate; opposing comb-shaped electrodes located between the substrate and the dielectric film, each of the opposing comb-shaped electrodes including an electrode finger, wherein at least one of the substrate and the dielectric film is a piezoelectric substance, an upper surface of the dielectric film, which is located above a gap between a tip of an electrode finger of one of the opposing comb-shaped electrodes and the other of the opposing comb-shaped electrodes, is inclined against an upper surface of the substrate in an extension direction of the electrode finger, and an inclination angle of the upper surface of the dielectric film against the upper surface of the substrate is equal to or larger than 30° and equal to or smaller than 50°.

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Patent Owner(s)

Patent OwnerAddress
TAIYO YUDEN CO LTD7-19 KYOBASHI 2-CHOME CHUO-KU TOKYO 104-0031

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Domon, Hiraki Tokyo, JP 1 3
Matsuda, Satoru Tokyo, JP 82 1425
Miura, Michio Tokyo, JP 63 1027
Yamashita, Takashi Tokyo, JP 203 1634

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