Liquid ejecting head, liquid ejecting apparatus and piezoelectric element
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United States of America Patent
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Nov 4, 2014
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app pub date -
Oct 30, 2012
filing date -
Nov 2, 2011
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Abstract
Provided is a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode, wherein the piezoelectric layer is formed of a complex oxide having a perovskite structure containing bismuth, barium, iron and titanium, binding energy of C—C and C—H states of a peak due to C 1s in an X-ray photoelectron spectroscopy measurement is standardized as 284.8 eV, when a peak obtained in a range of a binding energy of 775 eV or more and 785 eV or less is separated using a Gauss function, the binding energy has the peak in 779.0±0.8 eV, and one or more peak having intensity lower than that of the peak is included at the high binding energy side.
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